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Development of a quadrupole-based Secondary-Ion Mass Spectrometry (SIMS) system at Lewis Research CenterThe design, construction, and initial use of an ion microprobe to carry out secondary ion mass spectrometry (SIMS) of solid samples is reported. The system is composed of a differentially pumped custom-made UHV (Ultra High Vacuum) chamber, a quadrupole mass spectrometer and a telefocus A-DIDA ion gun with the capability of producing beams of Cesium, as well as inert and reactive gases. The computer control and acquisition of the data were designed and implemented using a personal computer with plug-in boards, and external circuitry built as required to suit the system needs. The software is being developed by using a FORTH-like language. Initial tests aimed at characterizing the system, as well as preliminary surface and depth-profiling studies are presently underway.
Document ID
19900014160
Acquisition Source
Legacy CDMS
Document Type
Technical Memorandum (TM)
Authors
Vargas-Aburto, Carlos (Kent State Univ. OH., United States)
Aron, Paul R. (NASA Lewis Research Center Cleveland, OH., United States)
Liff, Dale R. (Kent State Univ. OH., United States)
Date Acquired
September 6, 2013
Publication Date
June 1, 1990
Subject Category
Chemistry And Materials (General)
Report/Patent Number
NASA-TM-102531
E-5341
NAS 1.15:102531
Accession Number
90N23476
Funding Number(s)
PROJECT: RTOP 506-41-11
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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